Hydroxy-amino thermally cured undercoat for 193 NM lithography
AssigneeArch Specialty Chemicals, Inc.
InventorsPatrick Foster, Sydney George Slater, Thomas Steinhäusler, Andrew J. Blakeney, John Joseph Biafore
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Abstract
The present invention is directed to a thermally curable polymer composition, and a photolithographic substrate coated therewith, the composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator. The thermally curable polymer composition may be dissolved in a solvent and used as an undercoat layer in deep UV lithography.
Claims13
A thermally curable polymer composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator, wherein said hydroxyl-containing polymer comprises a polymer selected from the group consisting of:
- (a) a hydroxyl-containing polymer comprising a monomeric unit of allyl alcohol and having a polymer weight average molecular weight of 2,000 to 20,000, and
- (b) a hydroxyl-containing polymer comprising monomeric units of a hydroxystyrene and isobornyl acrylate or isobornyl methacrylate and having a polymer number average molecular weight of 14,000 to 30,000;
- and
- said amino cross-linking agent has the general formula:
- wherein Y is selected from the group consisting of NR5R6, and substituted or unsubstituted aryl or alkyl group, and R1 to R6 are independently selected from the group consisting of —CH2OH and CH2OR17 where R17 is a alkyl group of about 1 to 8 carbons.
A thermally curable polymer composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator, wherein said hydroxyl-containing polymer comprises:
- a hydroxyl-containing polymer comprising a monomeric unit of allyl alcohol and having a polymer weight average molecular weight of 2,000 to 20,000, and said amino cross-linking agent has the general formula:
- wherein Y is selected from the group consisting of NR5R6, and a substituted or unsubstituted aryl or alkyl group, and R1 to R6 are independently selected from the group consisting of —CH2OH and CH2OR17 where R17 is a alkyl group of about 1 to 8 carbons.
A thermally curable polymer composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator , wherein said hydroxyl-containing polymer comprises:
- a hydroxyl-containing polymer comprising monomeric units of a hydroxystyrene and isobornyl acrylate or isobornyl methacrylate and having a polymer number average molecular weight of 14,000 to 30,000;
- and
- said amino cross-linking agent has the general formula:
- wherein Y is selected from the group consisting of NR5R6, and substituted or unsubstituted aryl or alkyl group, and R1 to R6 are independently selected from the group consisting of —CH2OH and CH2OR17 where R17 is a alkyl group of about 1 to 8 carbons.
Dependencies are inferred from the claim text.