US 6,322,247 B1 · Microsensor housing

Abstract

A microsensor housing having a structure with at least one inlet at one end and a thermal property sensor at the other end. Situated between the inlet and the sensor is a convection shield. Sampled fluid is taken in the inlet from a channel carrying the fluid to be sampled. The convection flow lines of the fluid are barred by the convection shield. The fluid is diffused into a cavity between the shield and sensor. The sensor detects a thermal property of the diffused fluid. One preferred shield has holes about its perimeter with a solid center part of the shield covering at a distance the sensor. The channel carrying the fluid may have screens to reduce turbulence noise and to aid in fluid transport to and from the sensor housing.

Claims21

Dependent claims

A sensor and sensor housing comprising:

sensor means for sensing at least one thermal property of a fluid;
shield means, proximate to said sensor means, for shielding said sensor means from convection of the fluid that detrimentally affects an accuracy of the sensing the at least one thermal property of the fluid;
and
input means for reducing velocity and conveying a portion of fluid to said shield means.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

09/368,621Filed 5 Aug 1999 · continuation in part

Priority

28 Jan 1999

Granted

27 Nov 2001

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

G01N 33/0014
Sample conditioning: by eliminating a gas
G01F 1/6842
Structural arrangements; Mounting of elements, e.g. in relation to fluid flow: with means for influencing the fluid flow
G01F 1/6845
Structural arrangements; Mounting of elements, e.g. in relation to fluid flow: micromachined devices
G01F 5/00
Measuring a proportion of the volume flow

Microsensor housing

Life of this patent

Microsensor housing

Life of this patent

Abstract

Claims21