Back to results
US 6,320,737 B1Granted
Electrostatic chucking device
AssigneeSony Corporation
InventorsShinsuke Hirano, Tomohide Jozaki
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeSony Corporation
InventorsShinsuke Hirano, Tomohide Jozaki
Estimating the term…
The electrostatic chucking device 2 comprises an electrostatic chuck 4; a temperature detecting unit 10 for detecting the temperature of the electrostatic chuck 4; a power supply 9 connected to the electrostatic chuck 4 and used for impressing a DC voltage to the electrostatic chuck 4 to provide it with an attracting force; and a controller 11 for controlling the value of the DC voltage impressed by the power supply 9 according to the temperature of the electrostatic chuck detected by the temperature detecting unit 10. When the value of the temperature of the electrostatic chuck 4 detected by the temperature detecting unit 10 is higher than the preset value, the controller 11 lowers the voltage impressed by the power supply 9 from the preset value and when the value of the temperature of the electrostatic chuck 4 is lower than the preset value, the controller 11 raises the impressed voltage from the preset value, whereby the attracting force of the electrostatic chuck 4 can be kept irrespective of temperature change of the electrostatic chuck 4.
An electrostatic chucking device comprising:
An electrostatic chucking device comprising:
An electrostatic chucking device comprising:
An electrostatic chucking device comprising:
Dependencies are inferred from the claim text.