Thin film magnetic head and method of manufacturing the same, and method of forming thin film coil
AssigneeTDK Corporation
InventorYoshitaka Sasaki
Life of this patent
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Abstract
A dummy pole piece is selectively formed on a write gap layer. After that, a thin film coil of a first layer is formed on the write gap layer and, simultaneously, a coil connecting part integral with the thin film coil is formed on at least the side wall surfaces of the dummy pole piece. Then an insulating layer is formed so as to cover the thin film coil, the dummy pole piece and the coil connecting part, and the write gap layer and the insulating layer is polished until a top pole piece, a top connection piece, and the dummy pole piece are exposed. Subsequently, a thin film coil of a second layer is formed on the write gap layer and a coil connecting part integral with the thin film coil is formed on the exposed face of the coil connecting part.
Claims7
A thin film magnetic head comprising:
- at least two magnetic layers which are magnetically coupled to each other and have two magnetic poles facing each other sandwiching a gap layer in a part of the side facing a recording medium;
- and
- a thin film coil part disposed between the two magnetic layers sandwiching an insulating layer,
- wherein the thin film coil part has:
- a plurality of thin film coil layers;
- an interlayer insulating layer disposed so as to insulate the plurality of thin film coil layers from each other;
- a dummy pattern which is selectively disposed in the interlayer insulating layer and is in contact with two thin film coil layers sandwiching the interlayer insulating layer;
- and
- a coil connecting part which is formed on the side wall surfaces of the dummy pattern and electrically connects between two thin film coil layers sandwiching the interlayer insulating layer.
Dependencies are inferred from the claim text.