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US 6,320,700 B2Granted
Light-transmitting optical member, manufacturing method thereof, evaluation method therefor, and optical lithography apparatus using the optical member
AssigneeNikon Corporation
InventorMasaki Shiozawa
Life of this patent
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Abstract
An optical member for transmitting light of a wavelength less than about 200 nm including crystalline calcium fluoride with a potassium content less than about 0.5 ppm, wherein a degradation in a transmissivity of the optical member after an irradiation for a fixed period of time with the light of the wavelength of less than about 200 nm is less than about 5% of a transmissivity of the optical member before the irradiation.
Claims1
An optical lithography apparatus comprising:
- an illumination optical system that emits exposure light of a wavelength less than about 200 nm towards a mask having a pattern;
- and
- a projection optical system that projects an image of the pattern on the mask onto a substrate via the exposure light,
- wherein at least one of the illumination optical system and the projection optical system includes a light-transmitting optical member formed of crystalline calcium fluoride with a potassium content of less than about 0.5 ppm.
1 more element
Dependencies are inferred from the claim text.