Illuminating light selection device for a microscope

Abstract

A microscope having a device for selectable illumination for observation of a specimen by ultraviolet light, DUV light, or by visible light, and which can keep ultraviolet light and visible light separate. The microscope includes a visible light illuminating system to illuminate a specimen with visible light, an ultraviolet light illuminating system to illuminate the specimen with ultraviolet light, a visible light observation system to observe the specimen illuminated by the visible light illuminating system, and an ultraviolet light observation system to observe the specimen by the ultraviolet light illuminating system. When a half mirror is arranged in the visible light illuminating system light path, a second illuminating light selection member screens the incidence of ultraviolet light into the visible light illuminating system and is moved into the visible light illuminating system light path, and when a fully reflecting mirror is arranged in the ultraviolet light illuminating system light path, a first illuminating light selection member screens the incidence of visible light into the ultraviolet light illuminating system moves into the ultraviolet light illuminating system light path.

Dependencies are inferred from the claim text.