Diamond or diamond like carbon coated chemical sensors and a method of making same
OwnerRobert Andrew McGill, Paul Christopher Dorsey +1inventors
InventorsRobert Andrew McGill, Paul Christopher Dorsey, Douglas Brian Chrisey
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Abstract
A water vapor insensitive and corrosion resistant chemical or biochemical sensor device, including a transducer, coated with a protective coating of diamond or a diamond-like carbon, preferably by a pulsed laser deposition technique. The surface of the protective coating is coated with a chemoselective or bioselective absorption material or film.
Claims9
A method of making an acoustic wave chemical sensor device comprising the steps of selecting an acoustic wave device, cleaning the surface of said device, applying a layer of diamond or diamond-like carbon to the surface of said device, and coating the diamond-like carbon layer with a chemoselective coating layer.
Dependencies are inferred from the claim text.