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US 6,320,263 B1Granted
Semiconductor metalization barrier and manufacturing method therefor
AssigneeAdvanced Micro Devices, Inc.
InventorsSergey D. Lopatin, John A. Iacoponi
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Abstract
A semiconductor metalization barrier, and manufacturing method therefor, is provided which is deposited from an aqueous solution containing the Period 4 transition metals of chromium, nickel, and copper deposited on a palladium-activated copper bonding pad.
Claims5
A semiconductor device comprising:
- a semiconductor substrate;
- a first dielectric layer on said semiconductor substrate, said first dielectric layer having an opening provided therein;
- a first conductive layer disposed in said opening in said first dielectric layer;
- a second dielectric layer disposed on said first dielectric layer and said first conductive layer, said second dielectric layer having a second opening provided therein exposing a portion of said first conductive layer;
- a Period 5 transition metal disposed in said second opening whereby said first conductive layer is activated by the Period 5 transition metal;
- and
- a plurality of Period 4 transition metals in alloy selectively disposed on said Period 5 transition metal to form a barrier layer thereon an exterior electrical connection the Period 4 transition metals, wherein the external electrical connection uses a material selected from a group consisting of copper, aluminum, gold, silver, an alloy thereof, and a combination thereof.
4 more elements
Dependencies are inferred from the claim text.