Memory device with barrier portions having defined capacitance

Abstract

It is made possible to conduct writing and erasing information at high speed with a low gate voltage, to attain high integration with reduced power dissipation and to retain information accurately. A barrier layer, a transition layer, a barrier layer, a transition layer, a barrier layer, a charge accumulation layer and a barrier layer are stacked one after another on a conduction layer to cause transition of charges in the conduction layer to the charge accumulation layer by resonance tunneling. The conduction layer, the transition layers, and the charge accumulation layer are respectively made of Si. The barrier layers are respectively made of SiO2 so that electron affinity is made large and small alternately between those layers. Each capacitance respectively of the barrier layers is made smaller than e2/kBT so that charge transition does not occur according to the Coulomb blockade effect even if a voltage within a predetermined range is applied. Here, e is the electric prime quantity, kB is the Boltzmann's constant, and T is operation temperature.

Dependencies are inferred from the claim text.