Portable high resolution scanning electron microscope column using permanent magnet electron lenses
AssigneeInstitute of Materials Research and Engineering
InventorsAnjam Khursheed, Jacob Chee Hong Phang, John Thiam Leong Thong
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Abstract
A detachable, portable SEM column that is easily disconnected from the electron gun assembly and specimen chamber of the system, allowing different column designs to be used in a given SEM system. As an alternate design, the electron gun and column are configured as a single detachable, portable assembly. The column of the present invention contains a condenser lens and an objective lens, both designed employing permanent magnet elements for primary field generation. Relatively small coils are used for scanning and precise adjustment of focus.
Claims8
A scanning electron microscope system comprising:
- (a) a specimen chamber;
- (b) an electron gun;
- (c) a portable scanning electron microscope column including a condensor lens having a permanent magnet for supplying a magnetic field for demagnification of an electron beam from said electron gun;
- (d) a gun connection system for connecting said electron gun to said column;
- and
- (e) a specimen connection system for rapid connect and disconnect of said column from said specimen chamber;
- whereby a first column and electron gun assembly can be readily replaced with a second column and electron gun assembly.
A scanning electron microscope column comprising:
- (a) condenser lens having a permanent magnet for supplying a magnetic field for demagnification of an electron beam;
- (b) an objective lens;
- and
- (c) a specimen connection system for rapid connect and disconnect of said column from a specimen chamber.
Dependencies are inferred from the claim text.