Fabricating and using a micromachined magnetostatic relay or switch
AssigneeCalifornia Institute of Technology
InventorsYu-Chong Tai, John A. Wright
Life of this patent
Estimating the term…
Abstract
A micromachined magnetostatic relay or switch includes a springing beam on which a magnetic actuation plate is formed. The springing beam also includes an electrically conductive contact. In the presence of a magnetic field, the magnetic material causes the springing beam to bend, moving the electrically conductive contact either toward or away from another contact, and thus creating either an electrical short-circuit or an electrical open-circuit. The switch is fabricated from silicon substrates and is particularly useful in forming a MEMs commutation and control circuit for a miniaturized DC motor.
Claims17
A magnetostatic switch comprising:
- at least one substrate formed from a nonconductive or semiconductive material;
- a springing beam formed on the substrate;
- and
- two electrically conductive elements, one formed on the springing beam, that together define at least two switching states, including an open state in which the conductive elements are physically separated from each other, and a closed state in which the conductive elements physically contact each other;
- wherein the springing beam includes a magnetic material which, based on a magnetic field, creates an actuation force that causes the electrically conductive elements to switch from the closed state when the actuation force is not present in which the electrically conductive elements touch one another, and are in the open state when the actuation force is present, in which the electrically conductive elements do not touch one another.
A magnetostatic switch comprising:
- at least one substrate formed from a nonconductive or semiconductive material;
- a springing beam formed on the substrate;
- and
- two electrically conductive elements, one formed on the springing beam, that together define at least two switching states, including an open state in which the conductive elements are physically separated from each other, and a closed state in which the conductive elements physically contact each other;
- wherein the springing beam includes a magnetic material which, based on a magnetic field, creates an actuation force that causes the electrically conductive elements to switch from one of the switching states to another of the switching states;
- and
- wherein the conductive elements are held in the closed state by residual stress in the springing beam;
- and
- wherein the electrically conductive elements are in the closed state when the actuation force is not present.
A method of fabricating a magnetostatic switch, the method comprising:
- forming a temporary layer of removable material over a portion of a rigid substrate;
- forming a springing beam by depositing a layer of magnetic material over at least a portion of the temporary layer and over at least some portion of the substrate that is not covered by the temporary layer;
- and
- removing the temporary layer to form a gap between the substrate and a portion of the springing beam.
Dependencies are inferred from the claim text.