Transparent solar cell and method of fabrication
AssigneeXoptix, Inc.
InventorsJames P. Campbell, Eric W. Galyean, Harvey R. Spreckman
Life of this patent
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Abstract
A transparent solar cell and method of manufacture. The method includes steps of providing a transparent substrate. The method also includes forming a first conductive layer overlying the substrate. The method also includes forming a first amorphous silicon layer of a first dopant type overlying the first conductive layer. A step of annealing the first amorphous silicon layer is included. The method also forms a second amorphous silicon layer of a second dopant type, and also anneals the second amorphous silicon layer. A second conductive layer is formed overlying the second amorphous silicon layer. A combination of these steps forms a transparent solar cell structure.
Claims23
A method of forming a solar cell comprising:
- providing a substrate;
- forming a first layer of conductive material overlying the substrate;
- forming a second layer of amorphous silicon of a first dopant type overlying the first layer;
- annealing the second layer to convert the amorphous silicon of the second layer into polycrystalline silicon;
- forming a third layer of amorphous silicon of a second dopant type overlying the second layer forming a p-n junction between the second layer and the third layer;
- annealing the third layer to convert the amorphous silicon of the third layer into polycrystalline silicon;
- and
- forming a fourth layer of conductive material overlying the third layer.
A method for fabricating a structure comprising a transparent solar cell structure, the method comprising:
- forming a first layer overlying a transparent substrate;
- forming a second layer of amorphous silicon overlying the first layer, the second layer being of a first impurity type;
- converting the second layer into polycrystalline silicon;
- forming a third layer of amorphous silicon overlying the second layer, the third layer being of a second dopant type forming a p-n junction between the second layer and the third layer;
- converting the third layer into polycrystalline silicon;
- and
- forming a fourth layer of conductive material overlying the third layer.
A method for fabricating a structure comprising a transparent solar cell structure, the method comprising:
- providing a substrate;
- forming a first layer of conductive material overlying the substrate;
- forming a second layer of amorphous silicon overlying the first layer, the second layer being of a first impurity type;
- converting the second layer into polycrystalline silicon;
- forming a third layer of amorphous silicon overlying the second layer, the third layer being of a second dopant type;
- converting the third layer into polycrystalline silicon;
- forming a fourth layer of conductive material overlying the third layer;
- forming a fifth layer of amorphous silicon overlying the fourth layer;
- converting the fifth layer into polycrystalline silicon;
- forming a sixth layer of amorphous silicon overlying the fifth layer;
- converting the sixth layer into polycrystalline silicon;
- and
- forming a seventh layer of conductive material overlying the sixth layer.
A solar cell structure comprising:
- a substrate with a melting temperature of less than 450° C.;
- a first conductive layer overlying the substrate;
- a first polycrystalline film overlying the first conductive layer;
- a second polycrystalline film overlying the first polycrystalline film;
- a second conductive layer overlying the second polycrystalline film;
- a third polycrystalline film overlying the second conductive layer;
- a fourth polycrystalline film overlying the third polycrystalline film;
- and
- a third conductive layer overlying the fourth polycrystalline film.
Dependencies are inferred from the claim text.