Method for removal of cured polyimide and other polymers
AssigneeInternational Business Machines Corporation
InventorsMarilyn R. Leduc, Harold G. Linde, Gary P. Viens
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Abstract
Non-aqueous cleaning compositions capable of removing cured polyimides and other polymers from a metal circuitry containing substrate such as a semiconductor device for rework and other purposes without any significant adverse affect on the circuitry are provided consisting essentially of alkanolamines, preferably monoethanolamine or monoethanolamine-diethanolamine mixtures and optionally with a solvent such as NMP in an amount less than about 50% by weight. A method is also provided for removing polyimide coatings and other polymers from semiconductor devices using the cleaning compositions of the invention.
Claims3
A method for removing polyimide, cured polyimide, epoxy photoresist, hardened photoresist, or other polymers from a substrate comprising the steps of:
- providing a substrate comprising aluminum or copper, said substrate further comprising a polyimide, cured polyimide, epoxy, photoresist hardened photoresist, or other polymer coating;
- contacting said substrate for an effective time with a composition of 100 percent of one of monoethanolamine or diethanolamine at an elevated temperature between room temperature and about 170° C.;
- and
- removing said polyimide, cured polyimide, epoxy, photoresist, hardened photoresist or other polymer from said substrate without any significant adverse effect on said aluminum or copper.
Dependencies are inferred from the claim text.