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US 6,319,729 B1Granted
Method for manufacturing an angular rate sensor
AssigneeSensonor ASA
InventorsTerje Kvisteroey, Henrik Jakobsen
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Abstract
A method of manufacturing an angular-rate sensor by fabricating components of the angular-rate sensor on a silicon substrate, the components of the angular rate sensor including one or more masses, a support beam and buried conductors. Detection means are provided and the components are sealed in a cavity between a first glass plate and a second glass plate by anodic bonding. This enables angular rate sensors to be fabricated using low cost silicon wafers.
Claims11
A method of manufacturing an angular-rate sensor comprising the steps of:
- fabricating components of the angular-rate sensor on a silicon substrate, the components including one or more masses, a support beam and buried conductors, wherein p-type contacts to the buried conductors are provided by the steps of applying a photoresist mask to a surface of the substrate;
- implanting ions into the substrate at gaps in the photoresist mask;
- and diffusing the ions into the substrate;
- providing detection means;
- and
- sealing the components in a cavity between a first glass plate and a second glass plate by anodic bonding.
3 more elements
Dependencies are inferred from the claim text.