Manufacturing method of magnetoresistive effect sensor and manufacturing method of magnetic head with the sensor
AssigneeTDK Corporation
InventorsTetsuro Sasaki, Hiroaki Kawashima
Life of this patent
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Abstract
A method of manufacturing a MR sensor having at least an anti-ferromagnetic layer and a ferromagnetic layer, and to a method for manufacturing a magnetic head with the MR sensor. The sensor utilizes bias magnetic field provided by exchange coupling between the anti-ferromagnetic layer and the ferromagnetic layer. The sensor manufacturing method includes a step of depositing an anti-ferromagnetic layer to have a larger thickness than a target thickness, a step of ordering the deposited anti-ferromagnetic layer, and a step of thinning the ordered anti-ferromagnetic layer to have the target thickness.
Claims10
A method of manufacturing a magnetoresistive effect sensor with a giant magnetoresistive effect multi-layered sensing structure having at least an anti-ferromagnetic layer and a ferromagnetic layer that is to be exchange-coupled with said anti-ferromagnetic layer, said method comprising the steps of:
- depositing the ferromagnetic layer of said multi-layered sensing structure;
- depositing on said ferromagnetic layer, the anti-ferromagnetic layer of said multi-layered sensing structure to have a larger thickness than a target thickness;
- ordering said deposited anti-ferromagnetic layer;
- and
- thinning said ordered deposited anti-ferromagnetic layer over a whole region where the anti-ferromagnetic layer contacts to said ferromagnetic layer, to have the target thickness, such that a magnetic exchange coupling between the anti-ferromagnetic layer and the ferromagnetic layer remains.
Dependencies are inferred from the claim text.