Substrate transfer apparatus of substrate processing system

A substrate transfer apparatus of a substrate processing system, said substrate processing system comprised of:

• a plurality of vacuum chambers connected in series to form a polygonal ring shape, in each of which substrates are processed in vacuum environments,
• a transport system provided in said vacuum chambers to form a transport path of the polygonal ring shape, and
• a plurality of carriers transported along said transport path at predetermined intervals by said transport system, each of which holds at least two of the substrates,
• said substrate transfer apparatus further comprising;
• a first vacuum chamber arranged at an outside of the substrate processing system and provided with a plurality of first substrate cassettes arranged in parallel, on each of which a plurality of substrates is-placed,
• a second vacuum chamber communicating with a transport vacuum chamber through which said carriers move along said transport path, and provided with a first robot for substrate transfer arranged at a side of said first vacuum chamber, a second robot for substrate transfer arranged at a side of said transport vacuum chamber, and a plurality of second substrate cassettes arranged in parallel between said first robot and said second robot, on each of which a plurality of substrates is placed.