Ignition means for a cathodic arc source
AssigneeFilplas Vacuum Technology PTE Ltd.
InventorsDavid Ian Flynn, Xu Shi, Hong Siang Tan, Beng Kang Tay
Life of this patent
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Abstract
A coating of positive ions is applied to a substrate by generating an arc at a cathode, directing a beam of ions emitted from the cathode to the substrate via a filter path to remove macroparticles, igniting the arc by moving an arc ignition from a retracted position to an ignition position in which cathode contact is made, and storing the position in which arc ignition occurred.
Claims9
Apparatus for applying a coating of positive ions to a substrate, the apparatus comprising:
- a) means for generating an arc at a target cathode;
- b) means for directing a beam of ions emitted from the cathode to the substrate via a filter path substantially to remove macroparticles therefrom;
- c) arc ignition means including an ignition anode located in a retracted position towards a wall of the apparatus, and movable between the retracted position and an ignition position in contact with a surface of the cathode;
- and
- d) means for storing the position at which arc ignition occurred.
A method of applying a coating of positive ions to a substrate using a cathodic arc source apparatus, comprising the steps of:
- a) generating an arc at a target cathode;
- b) directing a beam of ions emitted from the cathode to the substrate via a filter path substantially to remove macroparticles therefrom;
- c) igniting the arc using an arc ignition means by moving the ignition means from a retracted position retracted towards a wall of the apparatus, towards an ignition position in contact with a surface of the cathode;
- and
- d) storing the position at which arc ignition occurred.
Apparatus for applying a coating of positive ions to a substrate, the apparatus comprising:
- a) a vacuum chamber;
- b) a cathode station in the vacuum chamber;
- c) means for generating an arc at a target cathode located at the cathode station;
- d) means for directing a beam of ions emitted from the cathode to the substrate via a filter path substantially to remove macroparticles therefrom;
- e) arc ignition means including a movable ignition anode located in a retracted position and movable between the retracted position and an ignition position in contact with the cathode;
- and
- f) means for storing the position at which arc ignition occurred.
Dependencies are inferred from the claim text.