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US 6,319,324 B1Granted
Method and apparatus for elimination of TEOS/ozone silicon oxide surface sensitivity
AssigneeApplied Materials, Inc.
InventorsBang C. Nguyen, Shankar Vankataranan, Ruby Liao, Peter W. Lee
Life of this patent
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Abstract
A method and apparatus for reducing surface sensitivity of a TEOS/O3 SACVD silicon oxide layer, formed over a substrate, that deposits a ramp layer while ramping pressure to a target deposition pressure and deposits an SACVD layer over the ramp layer. In one embodiment, the flow of ozone is stopped during the pressure ramp-up to control the thickness of the ramp layer.
Claims14
A substrate processing system for depositing a film on the major surface of a substrate, said system comprising:
- a vacuum chamber;
- a substrate heating system for supplying thermal energy to heat said substrate;
- a gas delivery system configured to deliver a process gas to said vacuum chamber;
- a vacuum system for reducing the pressure in said vacuum chamber;
- a system controller, including a computer for controlling said gas delivery system, said substrate heating system, and said vacuum system;
- and
- a memory coupled to said controller comprising a computer-usable medium having a computer-readable program code physically embodied therein for directing operation of said substrate processing system, said computer-readable program code including:
- computer-readable program code for causing said gas delivery system to introduce a process gas combination comprising TEOS and O3 into said chamber and to cause said vacuum system to reduce the pressure in the chamber to a low base level;
- computer-readable program code for causing said vacuum system to increase the pressure in the chamber at a substantially constant ramp-up rate from the low base pressure to a target subatmospheric deposition pressure and causing said substrate heating system to supply thermal energy to react the TEOS and O3 in the process gas combination to deposit a ramp silicon oxide layer over the major surface of the substrate;
- computer-readable program code for causing said gas delivery system to terminate the flow of O3 a predetermined time after the pressure starts to increase, to stop the deposition of the ramp silicon oxide layer prior to the attainment of the target subatmospheric deposition pressure;
- and
- computer-readable program code for causing said vacuum system to maintain the pressure in the chamber at the target deposition pressure when the target pressure is attained, causing the gas delivery system to restart the flow of O3 when the target deposition pressure is attained, and causing said substrate heating system to supply thermal energy to react the TEOS and O3 in the process gas combination while the pressure is equal to the target deposition pressure to form an SACVD layer over the ramp silicon oxide layer.
9 more elements
A substrate processing system for depositing a film on the major surface of a substrate, said system comprising:
- a vacuum chamber;
- a substrate heating system for supplying thermal energy to heat said substrate;
- a gas delivery system configured to deliver a process gas to said vacuum chamber;
- a vacuum system for reducing the pressure in said vacuum chamber;
- a system controller, including a computer for controlling said gas delivery system, said substrate heating system, and said vacuum system;
- and
- a memory coupled to said controller comprising a computer-usable medium having a computer-readable program code physically embodied therein for directing operation of said substrate processing system, said computer-readable program code including:
- computer-readable program code for causing said gas delivery system to introduce a process gas combination comprising TEOS and O3 into said chamber and to cause said vacuum system to reduce the pressure in the chamber to a low base level;
- computer-readable program code for causing said vacuum system to increase the pressure in the chamber at a substantially constant ramp-up rate from the low base pressure to a target subatmospheric deposition pressure and causing said substrate heating system to supply thermal energy to react the TEOS and O3 in the process gas combination to deposit a ramp silicon oxide layer over the major surface of the substrate;
- and
- computer-readable program code for causing said vacuum system to maintain the pressure in the chamber at the target deposition pressure when the target pressure is attained, and causing said substrate heating system to supply thermal energy to react the TEOS and O3 in the process gas combination while the pressure is equal to the target deposition pressure to form an SACVD layer over the ramp silicon oxide layer.
8 more elements
An apparatus for depositing one or more layers over a substrate disposed within a vacuum chamber of said apparatus, comprising:
- means for introducing the substrate into the vacuum chamber;
- means for establishing a base pressure in the vacuum chamber;
- means for introducing a process gas comprising TEOS and O3 into said chamber;
- means for increasing the pressure at a substantially constant rate from the base pressure to a target subatmospheric deposition pressure;
- means for supplying thermal energy to react TEOS and O3 of said process gas without forming a plasma while pressure is increasing to form the ramp layer on the substrate;
- means for maintaining said target deposition pressure when the pressure in the chamber becomes equal to the target deposition pressure;
- and
- means for supplying thermal energy to react the process gas without forming a plasma while pressure is equal to the target deposition pressure to form the SACVD layer over the ramp layer.
5 more elements
A substrate processing system for depositing a film on a substrate, the system comprising:
- a vacuum chamber;
- a substrate heating system for supplying thermal energy to heat the substrate;
- a gas delivery system configured to deliver a process gas to the vacuum chamber;
- a vacuum system for adjusting the pressure in the vacuum chamber;
- a system controller configured to control the gas delivery system, the substrate heating system, and the vacuum system;
- and
- a memory, coupled to the controller, comprising a computer-readable medium having a computer-readable program embodied therein for directing operation of the substrate processing system, the computer-readable program including:
- a first set of computer instructions for controlling the vacuum system to establish a base pressure in the chamber;
- a second set of computer instructions for controlling the gas delivery system to introduce a process gas comprising TEOS and O3 into the chamber;
- a third set of computer instructions for controlling the vacuum system to increase the pressure in the chamber at a substantially constant rate from the base pressure to a target subatmospheric deposition pressure;
- a fourth set of computer instructions for controlling the substrate heating system to supply thermal energy to react the TEOS and O3 in the process gas without forming a plasma while the pressure is increasing to deposit a ramp silicon oxide layer over the substrate;
- a fifth set of computer instructions for controlling the gas delivery system to terminate the flow of O3 into the chamber a predetermined time after the pressure starts to increase;
- a sixth set of computer instructions for controlling the vacuum system to maintain the pressure at the target deposition pressure when the pressure in the chamber becomes equal to the target deposition pressure;
- a seventh set of computer instructions for controlling the gas delivery system to restart the flow of O3 when the target deposition pressure is attained;
- and
- an eighth set of computer instructions for controlling the substrate heating system to supply thermal energy to react the process gas without forming a plasma while the pressure is equal to the target deposition pressure to form an SACVD layer over the ramp layer.
13 more elements
A substrate processing system for depositing a film on a substrate, the system comprising:
- a vacuum chamber;
- a substrate heating system for supplying thermal energy to heat the substrate;
- a gas delivery system configured to deliver a process gas to the vacuum chamber;
- a vacuum system for adjusting the pressure in the vacuum chamber;
- a system controller configured to control the gas delivery system, the substrate heating system, and the vacuum system;
- and
- a memory, coupled to the controller, comprising a computer-readable medium having a computer-readable program embodied therein for directing operation of the substrate processing system, the computer-readable program including:
- a first set of computer instructions for controlling the vacuum system to establish a base pressure in the chamber;
- a second set of computer instructions for controlling the gas delivery system to introduce a process gas comprising TEOS and O3 into the chamber;
- a third set of computer instructions for controlling the vacuum system to increase the pressure in the chamber at a substantially constant rate from the base pressure to a target subatmospheric deposition pressure;
- a fourth set of computer instructions for controlling the substrate heating system to supply thermal energy to react the TEOS and O3 in the process gas without forming a plasma while the pressure is increasing to deposit a ramp silicon oxide layer over the substrate;
- a fifth set of computer instructions for controlling the vacuum system to maintain the pressure at the target deposition pressure when the pressure in the chamber becomes equal to the target deposition pressure;
- and
- a sixth set of computer instructions for controlling the substrate heating system to supply thermal energy to react the process gas without forming a plasma while the pressure is equal to the target deposition pressure to form an SACVD layer over the ramp layer.
11 more elements
Dependencies are inferred from the claim text.