System and method for performing low contamination extrusion for microelectronics applications

A system for extruding coating material onto a substrate using an extrusion head which minimizes emission of contaminants into the coating fluid, the system comprising:

• an extrusion head for extruding said coating fluid onto a surface to be coated, wherein at least one fluid contacting surface of said extrusion head is composed of a non-metallic substance, thereby minimizing metal to coating fluid contact and emission of contaminants into said coating fluid;
• and
• a mechanism for moving the extrusion head substantially linearly with respect to a substrate,
• wherein the extrusion head comprises:
• two metal parts forming the structure of said extrusion head;
• and
• a non-metallic shim disposed between said two metal parts, wherein the non-metallic shim prevents galvanic potential induced corrosion between said metal parts and said shim, thereby minimizing emission of contaminants into said coating fluid.

A system for extruding coating material onto a substrate using an extrusion head which minimizes emission of contaminants into the coating fluid, the system comprising:

• an extrusion head for extruding said coating fluid onto a surface to be coated, wherein at least one fluid contacting surface of said extrusion head is composed of a non-metallic substance, thereby minimizing metal to coating fluid contact and emission of contaminants into said coating fluid;
• a mechanism for moving the extrusion head substantially linearly with respect to a substrate;
• a fluid reservoir;
• a pump connected to said fluid reservoir;
• and
• fluid delivery means connecting said pump and said fluid reservoir to said extrusion head;
• wherein all fluid contacting surfaces in said system for extruding are non-metallic, thereby further minimizing emission of contaminants into said coating fluid.

A method for extruding coating material onto a substrate using an extrusion head which minimizes emission of contaminants into the coating fluid, the method comprising the steps of:

• minimizing metal to coating fluid contact and emission of contaminants into said coating fluid by deploying a non-metallic substance for at least one fluid contacting surface of said extrusion head;
• extruding coating fluid having minimized contaminants onto said substrate;
• and
• moving the extrusion head substantially linearly with respect to the substrate.

Apparatus for extruding coating fluid uniformly along the extrusion orifice of an extrusion head while minimizing contaminants, the apparatus comprising:

• two fabricated parts forming the structure of the extrusion head;
• a non-metallic shim disposed between said fabricated parts, thereby establishing an extrusion orifice between said parts, wherein:
• the shim and the parts are dimensionally consistent enabling uniform fluid flow along a length of said extrusion orifice;
• the non-metallic material of the shim acts to reduce emission of contaminants into the coating fluid;
• said shim has a shape;
• and
• the extrusion orifice has edges, and wherein the shim shape comprises:
• an opening within a fluid cavity inside the extrusion head exceeding the length of the extrusion orifice, permitting said coating fluid to flow unobstructed near the edges of said extrusion orifice thereby enabling uniform fluid flow along the length of said extrusion orifice.

A system for extruding coating fluid onto a substrate while minimizing contamination of the coating fluid, the system comprising:

• an extrusion head comprising ceramic fluid contacting components, thereby minimizing contamination of said fluid arising from contact with said fluid contacting components, said extrusion head having an extrusion slot;
• a non-metallic shim contoured to permit a uniform rate of fluid flow at said extrusion slot, and a uniform residence time of said coating fluid in said extrusion head;
• an impact resistant outer structure surrounding said extrusion head to protect said head against damage;
• and
• hydrophobic surface treatments on selected portions of said outer structure and said non-metallic extrusion head to prevent migration of said coating fluid along a periphery of said extrusion head and, alternatively, of said outer structure, thereby preventing drying and flaking of coating material on said head and, alternatively, on said outer structure.