Adjustable cold trap with different stages
AssigneeVanguard International Semiconductor Corporation
InventorsShih-Min Shih, Kun-Lin Huang
Life of this patent
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Abstract
A new three-stage cold trap configuration is provided that allows for significantly improved cold trap efficiency and reduced Preventive Maintenance of the cold trap. The cold trap of the invention is provided with three stages that are used for the removal of impurities from processing gasses after they have been released from a processing chamber. The spaces between the three plates of the cold trap are not the same while the angle under which the gas impacts the plates differs from conventional cold trap designs. The three plates of the cold trap are furthermore adjustable, making the design of the cold trap of the invention flexible and readily applicable to a range of cold trap requirements.
Claims5
The apparatus of a cold trap that can be used for gas purification purposes, comprising:
- a multiplicity of cleaning plates, said multiplicity of cleaning plates comprising three clusters of cleaning plates hereby referred to as cluster one, cluster two and cluster three, said clusters one, two and three being mounted in a path of flow of said gas through said cold trap, said cluster one being mounted closest to a port of entry of said gas into said cold trap, said cluster three being mounted closest to a port of exit of said gas from said cold trap, said cluster two being mounted in between said cluster one and said cluster three, said cleaning plates having a plane, said plane comprising:
- (i) a surface having a geometric form that is selected from the group consisting of a square and a rectangle and a circle;
- (ii) a geometric center being a point of intersect of diagonals of said square or said rectangle or a center of said circle;
- (iii) a first geometric line through said geometric center having a direction that is either parallel to two opposing sides of said square or said rectangle or is arbitrarily assigned across a surface of said circle;
- and
- (iv) a second geometric line through said geometric center having a direction that is perpendicular to said direction of said first geometric line;
- and
- a mounting apparatus for mounting said cluster one, cluster two and cluster three of cleaning plates.
Dependencies are inferred from the claim text.