Method of making an electron emission device by anode oxidation

An electron emission device production method comprising steps of:

• forming a gate electrode layer over an insulation layer which is formed over a cathode electrode on a substrate;
• forming a plurality of indentations in said gate electrode layer by anode oxidation;
• forming a plurality of first openings through said gate electrode layer corresponding to said plurality of indentations;
• using said gate electrode layer as a mask, forming a plurality of second openings through said insulation layer, wherein each of said second openings communicates with one of said first opening so as to expose said cathode electrode;
• and
• forming emitter electrodes on said cathode electrode in said second openings.

An electron emission device production method comprising steps of:

• forming a gate electrode layer over an insulation layer which is formed over a cathode electrode on a substrate;
• forming a conductive mask layer over said gate electrode layer with a plurality of openings therein;
• forming a plurality of first openings by anode oxidation in said gate electrode layer using said mask layer;
• forming a plurality of second openings through said insulation layer, wherein each of said second openings communicates with one of said first opening so as to expose said cathode electrode;
• and
• forming emitter electrodes on said cathode electrode in said second openings.