Optical mirror system with multi-axis rotational control
AssigneeC Speed Corporation
InventorPaul Merritt Hagelin
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Abstract
An optical mirror system in accordance with the present invention is disclosed. The optical mirror system comprises a mirror frame and an optical surface coupled to the mirror frame. The mirror system further includes an electrostatic shield coupled to optical surface and the mirror frame and an electrode system for causing the optical surface to be rotated without being deformed. In operation, primary and secondary electrodes are utilized. Differential capacitive sensing may be used to reduce the noise in the sense signal. The mirror can be fabricated using standard surface-micromachining processes, and aside from one-time assembly operations, the device has no frictional wear.
Claims7
An optical mirror system comprising:
- a mirror frame;
- an optical surface coupled to the frame;
- an electrostatic shield coupled to the optical surface and the mirror frame;
- a suspension beam assembly coupled between the electrostatic shield and mirror frame;
- and
- an electrode system for causing the optical surface to be rotated, wherein the electrostatic shield isolates the optical surface from bending due to the electrostatic field created by said electrode system.
Dependencies are inferred from the claim text.