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US 6,318,174 B1Granted
Sensor and method of use
AssigneeMotorola, Inc.
InventorsJohn E. Schmiesing, Guang X. Li, Juergen A. Foerstner, Muh-Ling Ger, Paul L. Bergstrom, Frank A. Shemansky, Jr.
Life of this patent
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Abstract
A sensor has an electrode (120) that is movable along three mutually perpendicular axes (10, 11, 12). The sensor also has stationary over-travel limiting structures that restrict the movement of the electrode (120) along the three axes (10, 11, 12).
Claims18
A sensor comprising:
- a substrate;
- an electrode coupled to the substrate and movable relative to the substrate along three axes substantially orthogonal to each other;
- and
- a structure coupled to the substrate, stationary relative to the substrate, and located at an outer perimeter of the electrode wherein the structure limits mobility of the electrode along the three axes.
1 more element
A method of using a sensor comprising:
- providing a substrate;
- providing an electrode coupled to the substrate, the electrode movable along three axes relative to the substrate, the electrode having a body and a plurality of fingers each with a first end coupled to the body and a second end extending away from the body;
- and
- limiting movement of the second ends of the plurality of fingers to limit movement of the electrode along the three axes.
1 more element
Dependencies are inferred from the claim text.