Nanoporous silica treated with siloxane polymers for ULSI applications
AssigneeAlliedSignal Inc.
InventorsNicole Rutherford, James S. Drage, Ron Katsanes, Hui-Jung Wu, Teresa Ramos
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Abstract
A surface-coated nanoporous silica dielectric film that is prepared by a process comprising the steps of forming a nanoporous silica dielectric coating on a substrate, and coating the formed nanoporous silica dielectric film with a coating composition comprising a polymer precursor, under conditions effective to form a strength-enhancing and/or hydrophobicity enhancing layer on the treated nanoporous silica dielectric film.
Claims19
A surface-coated nanoporous silica dielectric film that is prepared by a process comprising the steps of forming a nanoporous silica dielectric coating on a substrate, and coating the formed nanoporous silica dielectric coating with a coating composition comprising a polymer, under conditions effective to form a layer on said nanoporous silica dielectric coating.
A method of preparing a surface-coated nanoporous silica dielectric film comprising the steps of forming a nanoporous silica dielectric coating on a substrate, and coating the formed nanoporous silica dielectric coating with a coating composition comprising a polymer, under conditions effective to form a polymer layer on said nanoporous silica dielectric coating.
Dependencies are inferred from the claim text.