Charged particle beam apparatus and method for operating the same
AssigneeHitachi, Ltd.
InventorsKazuo Hiramoto, Hiroshi Akiyama, Koji Matsuda, Tetsuro Norimine, Masahiro Tadokoro
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AssigneeHitachi, Ltd.
InventorsKazuo Hiramoto, Hiroshi Akiyama, Koji Matsuda, Tetsuro Norimine, Masahiro Tadokoro
Estimating the term…
A method of irradiation with a charged particle beam and an irradiation apparatus wherein the charged particle beam supplied from an accelerator and extracted from the irradiation apparatus. The irradiation apparatus includes an electromagnet for scanning with the charged particle beam. The method includes the steps of stopping the extraction of the charged particle beam from the irradiation apparatus, changing an irradiation point of the charged particle beam by controlling the electromagnet under a condition when the extraction is stopped, and resuming the extraction of the charged particle beam from the irradiation apparatus after changing the irradiation point.
A method of irradiation with a charged particle beam, which is supplied from an accelerator to an irradiation apparatus comprising an electromagnet, and extracted from the irradiation apparatus for scanning with the charged particle beam, comprising the steps of:
An accelerator system comprising:
Dependencies are inferred from the claim text.