Thermal inkjet printhead and high-efficiency polycrystalline silicon resistor system for use therein

A high efficiency ink delivery printhead comprising:

• at least one primary layer comprised of doped polycrystalline silicon, said doped polycrystalline silicon being selected from the group consisting of phosphorous-doped polycrystalline silicon, boron-doped polycrystalline silicon, arsenic-doped polycrystalline silicon, antimony-doped polycrystalline silicon, and mixtures thereof, said primary layer further comprising at least one portion thereof which functions as a resistor element that is used to expel ink on-demand from said printhead;
• at least one secondary layer of material positioned above said primary layer, said secondary layer comprising:
• at least one section thereof comprised of a metal silicide compound which is operatively connected to and in electrical communication with said resistor element, said metal silicide compound being selected from the group consisting of titanium silicide, cobalt silicide, tungsten silicide, platinum silicide, molybdenum silicide, tantalum silicide, palladium silicide, and mixtures thereof;
• and
• at least another section thereof comprised of undoped polycrystalline silicon which is at least partially aligned over and above said resistor element, said section of said secondary layer which is comprised of said undoped polycrystalline silicon further comprising a substantially planar top surface and said section of said secondary layer which is comprised of said metal silicide compound further comprising a substantially planar upper face, said top surface and said upper face being substantially coplanar relative to each other;
• a plurality of additional layers located between said primary layer and said secondary layer, said plurality of additional layers comprising a layer comprised of at least one silicon oxide compound positioned at least partially over and above said resistor element and a layer comprised of silicon nitride positioned at least partially over and above said layer comprised of said silicon oxide compound;
• and
• at least one layer of electrically conductive material positioned over and above at least part of said section of said secondary layer which is comprised of said metal silicide compound.

A high efficiency ink delivery printhead comprising:

• a resistor element comprised of polycrystalline silicon;
• and
• at least one layer of material positioned above said resistor element, said layer of material comprising:
• at least one section thereof comprised of a metal silicide compound which is operatively connected to and in electrical communication with said resistor element;
• and
• at least another section thereof comprised of polycrystalline silicon.

An ink delivery system for use in generating printed images comprising:

• a high efficiency ink delivery printhead comprising:
• at least one primary layer comprised of doped polycrystalline silicon, said primary layer further comprising at least one portion thereof which functions as a resistor element that is used to expel ink on-demand from said printhead;
• and
• at least one secondary layer of material positioned above said primary layer, said secondary layer comprising at least one section thereof comprised of a metal silicide compound which is operatively connected to and in electrical communication with said resistor element, and at least another section thereof comprised of undoped polycrystalline silicon;
• and
• an ink containment vessel operatively connected to and in fluid communication with said printhead.

An ink delivery system for use in generating printed images comprising:

• a high efficiency ink delivery printhead comprising:
• at least one primary layer comprised of doped polycrystalline silicon, said doped polycrystalline silicon being selected from the group consisting of phosphorous-doped polycrystalline silicon, boron-doped polycrystalline silicon, arsenic-doped polycrystalline silicon, antimony-doped polycrystalline silicon, and mixtures thereof, said primary layer further comprising at least one portion thereof which functions as a resistor element that is used to expel ink on-demand from said printhead;
• at least one secondary layer of material positioned above said primary layer, said secondary layer comprising at least one section thereof comprised of a metal silicide compound which is operatively connected to and in electrical communication with said resistor element, said metal silicide compound being selected from the group consisting of titanium silicide, cobalt silicide, tungsten silicide, platinum silicide, molybdenum silicide, tantalum silicide, palladium silicide, and mixtures thereof, said secondary layer further comprising at least another section thereof that is comprised of undoped polycrystalline silicon which is at least partially aligned over and above said resistor element, said section of said secondary layer which is comprised of said undoped polycrystalline silicon further comprising a substantially planar top surface and said section of said secondary layer which is comprised of said metal silicide compound further comprising a substantially planar upper face, said top surface and said upper face being substantially coplanar relative to each other;
• a plurality of additional layers located between said primary layer and said secondary layer, said plurality of additional layers comprising a layer comprised of at least one silicon oxide compound positioned at least partially over and above said resistor element and a layer comprised of silicon nitride positioned at least partially over and above said layer comprised of said silicon oxide compound;
• and
• at least one layer of electrically conductive material positioned over and above at least part of said section of said secondary layer which is comprised of said metal silicide compound;
• and
• an ink containment vessel operatively connected to and in fluid communication with said printhead.

A method for producing a high efficiency ink delivery printhead comprising:

• providing at least one primary layer comprised of doped polycrystalline silicon, said primary layer further comprising at least one portion thereof which functions as a resistor element that is used to expel ink on-demand from said printhead;
• operatively attaching at least one secondary layer comprised of undoped polycrystalline silicon in position above said primary layer;
• and
• converting at least one portion of said secondary layer to a metal silicide compound in order to produce a metal silicide-containing section and an undoped polycrystalline silicon-containing section, said metal silicide-containing section being operatively connected to and in electrical connection with said resistor element, with said undoped polycrystalline silicon-containing section being at least partially aligned over and above said resistor element.