Method for controlling maintenance of semiconductor fabricating equipment arranged in a processing line

A method for controlling maintenance of semiconductor fabricating equipment, comprising:

• receiving, at a maintenance module in a host computer, a first set of maintenance data generated from semiconductor fabricating equipment;
• comparing a value of the first set of maintenance data with a predesignated first reference threshold;
• if the value of the first set of maintenance data is not less than the predesignated first reference threshold, receiving at the maintenance module a second set of maintenance data from the semiconductor fabricating equipment;
• determining whether maintenance for the semiconductor fabricating equipment was carried out, after said receiving the second set of maintenance data;
• if maintenance for the semiconductor fabricating equipment was not carried out, comparing a value of the second set of maintenance data with a predesignated second reference threshold at the maintenance module;
• and
• interlocking the semiconductor fabricating equipment, if the value of the second set of maintenance data is not less than the predesignated second reference threshold, to stop operation of the semiconductor fabricating equipment.