Process and device for the surface treatment of a substrate by an electrical discharge between two electrodes in a gas mixture
AssigneeL'Air Liquide, Societe Anonyme pour l'Exploitation des Procedes Georges Claude
InventorsAlain Villermet, François Coeuret, Panayotis Cocolios, Bernd Martens, Eckhard Prinz, Jürgen Salge
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