Substrate temperature measuring apparatus, substrate temperature measuring method, substrate heating method and heat treatment apparatus

In a temperature measuring apparatus for a substrate provided with a temperature measuring means and a covering member for covering said temperature measuring means in which a temperature measuring portion of said temperature measuring means is made to be in contact with a substrate through said covering member to measure a temperature of said substrate heated by irradiation of light,

• the temperature measuring apparatus for a substrate being characterized in that
• said covering member, having a portion covering said temperature measuring portion, said portion being made of a material with a high heat conductivity, and
• said covering member, having another portion, excluding the covering member which is made of said material with a high heat conductivity, said another portion being made of a material with a high light reflection factor.

In a temperature measuring method for a substrate provided with a temperature measuring means and a covering member for covering said temperature measuring means in which a temperature measuring portion of said temperature measuring means is made to be in contact with a substrate through said covering member to measure a temperature of said substrate heated by irradiation of light,

• the temperature measuring method for a substrate being characterized in that a temperature of said substrate is measured by using a temperature measuring apparatus which
• said covering member, having a portion covering said temperature measuring portion, said portion being made of a material with a high heat conductivity, and
• said covering member, having another portion, excluding the covering member which is made of said material with a high heat conductivity, said another portion being made of a material with a high light reflection factor.

In a temperature measuring method for a substrate provided with a temperature measuring means and a covering member for covering said temperature measuring means in which a temperature measuring portion of said temperature measuring means is made to be in contact with a substrate through said covering member to measure a temperature of said substrate heated by irradiation of light,

• the temperature measuring method for a substrate being characterized in that a temperature of said substrate is measured by using a temperature measuring apparatus which
• said covering member, having a portion covering said temperature measuring portion, said another portion being made of a material with a high heat conductivity, and
• said covering member, having another portion, excluding the covering member which is made of said material with a high heat conductivity, said another portion being made of a material with a high light transmission factor.

A heating method for heating a substrate by irradiation of light,

• the heating method being characterized in that the
• irradiation of a light irradiated on a surface of the substrate on an opposite side from a surface of said substrate to which a temperature measuring portion of a temperature measuring apparatus for measuring a temperature of said substrate comes in contact, is raised higher than the irradiation intensity of a light irradiated on the surface of the substrate on the side with which said temperature measuring portion comes in contact.