Fluorescent x-ray analyzer

A fluorescent x-ray analyzer comprising:

• a light-dispersing crystal and a detector which are rotatable while maintaining a specified angular relationship therebetween such that fluorescent x-rays from a sample are scanned by said detector;
• first-order profile producing means for producing a first-order profile showing x-ray intensities against scan angle from detection signals from said detector within a specified pulse height discriminating range of wavelength;
• higher-order profile producing means for producing a higher-order profile showing x-ray intensities against scan angle from detection signals from said detector within a higher pulse height discriminating range of wavelength which is higher than said specified pulse height discriminating range;
• memory means for storing data related to ratios between preliminarily measured peak intensities of first-order and higher-order beams of a plurality of elements;
• and
• data processing means for identifying peaks in said first-order profile and said higher-order profile, if there is a possibility of a peak formed by a first-order spectrum of one element and a higher-order spectrum of another element overlapping each other, by using data stored in said memory means and thereby determining contributions to said peaks in said first-order profile and said higher-order peaks from said first-order spectrum and said higher-order spectrum.