Mirror for an ultraviolet laser and method

Abstract

A mirror for an ultraviolet laser and method of formation such that the mirror is highly reflective to a laser beam generated in the ultraviolet spectrum over a wide range of incident angles and has little fluctuation in polarization reflectivity in relation to a change in an incident angle of the beam. The mirror has a structure comprising an aluminum (Al) film coated over a substrate and a dielectric multi-layer film coated over the aluminum film. The dielectric multi-layer film comprises alternating layers of a low refractive index layer and a high refractive index layer according to the following relationship: L1/[H/L2]x and with an optical thickness according to the following relationship: 2L1=L2≈H=0.25˜0.35λ: or 2L1≈L2=H=0.25˜0.35λ: wherein: L1, L2: represents the low refractive index layers; H: represents the high refractive index layer(s); and X: is an integer between 1 to 10.

Dependencies are inferred from the claim text.