Method and apparatus for ablating high-density array of vias or indentation in surface of object

A process for ablating an array of features in a desired object, the process comprising the steps of:

• a) supplying non-collimated coherent light, from a radiation source, to illuminate at least one expansion lens for suitably expanding the non-collimated coherent light beam to a desired diameter;
• b) directing the expanded non-collimated coherent light beam at sequentially arranged first and second reflective mirrors of an X and Y-axis repeat positioner;
• c) reflecting the supplied non-collimated coherent light via the second reflective mirror of the X and Y-axis repeat positioner to a rear surface of a desired area of a collimating component for collimating the supplied non-collimated coherent light, the collimating component comprising one of a collimating lens, a refractive component, a diffractive component and a holographic component;
• d) emitting collimated coherent light from a front surface of the collimating component to illuminate a desired imaging segment of an imaging element comprising one of a holographic element, a diffractive element and a binary mask element, the imaging element comprising a series of individual imaging segments which, when illuminated with a collimated coherent light, produce a single image for ablating a corresponding feature in a desired object located at a working distance from the imaging element;
• e) providing a table for registering the desired object at the working distance from the imaging element;
• and
• repeating at least steps (a) through (d), a plurality of times, to illuminate desired individual imaging segments of the imaging element with collimated coherent light from the radiation source to ablate the array matrix of features in the desired object.

A process for ablating an array matrix of features in a desired object, the process comprising the steps of:

• a) supplying non-collimated coherent light to illuminate a holographic component;
• b) emitting collimated coherent light from a front surface of the holographic component to illuminate a desired imaging segment of one of a holographic element, a diffractive element and a binary mask element, comprising series of individual imaging segments which, when illuminated with a collimated coherent light, produce a signal image for ablating a corresponding feature in a desired object located at a working distance from the imaging element;
• c) providing a table for registering the desired object at the working distance from the imaging element;
• and
• repeating steps (a) and (b) a plurality of times to illuminate desired individual imaging segments of the imaging element with collimated coherent light from the radiation source to ablate the array matrix of features in the desired object.