Method of adjusting a scanning exposure apparatus and scanning exposure apparatus using the method

A scanning exposure apparatus for transferring, via a projecting means, an image of a pattern formed on a mask onto a substrate while synchronously moving both said mask and said substrate with respect to an illumination light, said scanning exposure apparatus comprising:

• illuminating optical means for defining an illumination area of said illumination light when the exposure apparatus is operating in a scanning exposure mode;
• and
• control means for changing the illuminating optical means so that said illumination area of the illumination light is set to have an area different from the illumination area used in the scanning exposure mode, when the scanning exposure apparatus is operating in a measurement mode.

An exposure apparatus for transferring, via a projecting optical system, an image of a pattern formed on a mask onto a substrate using an illumination light generated by a light source, said exposure apparatus comprising:

• an illuminating optical system having optical elements that define an illumination area of said illumination light generated by said light source when the exposure apparatus is operating in an exposure mode;
• and
• a controller coupled to the illuminating optical system that changes the optical elements of said illuminating optical system so that said illumination area of the illumination light is set to have an area different from the illumination area used in the exposure mode, when the exposure apparatus is operating in a measurement mode.