Method of making a display device with electrode characteristics
AssigneeCanon Kabushiki Kaisha
InventorsYoshiaki Suzuki, Yuichi Masaki, Keishi Danjo
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Abstract
A display device is constituted by a pair of substrates at least one of which is provided with a display electrode. The display electrode comprises an electroconductive transparent film comprising indium oxide and/or tin oxide and having a surface unevenness of at most 30 Å. The transparent film may preferably be an ITO film containing an amorphous component. The transparent film is effective in improving a surface flatness allowing a good alignment control performance while retaining a good transmittance and a low sheet resistance and is readily etched with weak acid to suppress peeling of an underlying layer thereof and an occurrence of microcracks therein.
Claims12
A process for producing a display device comprising a substrate having thereon a display electrode comprising an indium oxide and/or tin oxide electroconductive transparent film, comprising the steps of:
- forming on a substrate a film comprising indium oxide and/or tin oxide, said film containing an amorphous component and being formed by sputtering while keeping the temperature of the substrate at 100° C. or below;
- patterning said film comprising indium oxide and/or tin oxide containing amorphous component by etching using a weak-acid type etchant;
- and
- annealing the patterned film while keeping the temperature of 150-300° C.
Dependencies are inferred from the claim text.