Electro-optical device
OwnerYasuhiko Takemurainventor
Life of this patent
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Abstract
A display device is disclosed. The display device comprises a glass substrate, and an insulating film provided on the glass substrate and comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen. A thin film transistor and a pixel electrode are provided over the insulating film.
Claims102
A display device comprising:
- a glass substrate;
- an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate;
- a source region and a drain region provided over said insulating film;
- a channel forming region provided over said substrate between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode.
A display device comprising:
- a glass substrate;
- an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate;
- a source region and a drain region provided over said insulating film;
- a channel forming region provided over said substrate between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode.
A display device comprising:
- a substrate;
- a source region and a drain region provided over said substrate;
- a channel forming region provided over said substrate between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode,
- wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
A display device comprising:
- a substrate;
- a source region and a drain region provided over said substrate;
- a channel forming region provided over said substrate between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode,
- wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
A liquid crystal display comprising:
- a glass substrate;
- an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate;
- a source region and a drain region provided over said insulating film;
- a channel forming region provided over said substrate between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode.
A liquid crystal display comprising:
- a glass substrate;
- an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate:
- a source region and a drain region provided over said insulating film;
- a channel forming region provided over said substrate between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode.
A liquid crystal display comprising:
- a substrate;
- a source region and a drain region provided over said substrate;
- a channel forming region provided over said substrate between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
A liquid crystal display comprising:
- a substrate;
- a source region and a drain region provided over said substrate;
- a channel forming region provided over said substrate between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode,
- wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
A liquid crystal display having an active matrix region, said active matrix region comprising:
- a glass substrate;
- an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate;
- a source region and a drain region provided over said insulating film;
- a channel forming region provided over said insulating film between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode.
A liquid crystal display having an active matrix region, said active matrix region comprising:
- a substrate;
- a source region and a drain region provided over said substrate;
- a channel forming region provided over said substrate between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode,
- wherein said lightly doped drain has a sheet resistance of 10 to 200K{tilde over (Ω)}square.
A liquid crystal display having an active matrix region, said active matrix region comprising:
- a glass substrate;
- an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate;
- a source region and a drain region provided over said insulating film;
- a channel forming region provided over said insulating film between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode,
- wherein said lightly doped drain has a sheet resistance of 10 to 200K{tilde over (Ω)}square.
A liquid crystal display having an active matrix region, said active matrix region comprising:
- a substrate;
- a source region and a drain region provided over said substrate;
- a channel forming region provided over said substrate between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode,
- wherein said lightly doped drain has a sheet resistance of 10 to 200K{tilde over (Ω)}square, and
- wherein said source region and said drain region have a sheet resistance of 300 to 800{tilde over (Ω)}square.
A liquid crystal display having an active matrix region, said active matrix region comprising:
- a glass substrate;
- an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate;
- a source region and a drain region provided over said insulating film;
- a channel forming region provided over said insulating film between said source region and said drain region;
- a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween;
- a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode;
- a pixel electrode provided over said transparent organic film;
- a contact hole provided in said transparent organic film;
- a lightly doped drain provided between said channel forming region and said drain region;
- and
- an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode,
- wherein said lightly doped drain has a sheet resistance of 10 to 200 KΩsquare, and
- wherein said source region and said drain region have a sheet resistance of 300 to 800Ωsquare.
Dependencies are inferred from the claim text.