Fluid fine particle measuring system for processing semiconductors

A fine particle measuring system for semiconductor cleaning fluid, wherein light is directed through a measuring cell containing a sample of cleaning fluid and a detector system measures the light from the measuring cell to determine a measurement of the fine particles in the cleaning fluid, comprising:

• means for circulating the sample of cleaning fluid;
• a cooling unit to cool the sample cleaning fluid before entering the measuring cell;
• a deaerator for removing gas bubbles from the sample cleaning fluid;
• a first conduit connected to the measuring cell to receive the sample cleaning fluid as it is exhausted from the measuring cell;
• and
• a second conduit connected to the deaerator and the first conduit to draw the gas from the bubbles separated from the deaerator and to mix the gas with the exhausted sample cleaning fluid, the means for circulating forcing the exhausted sample cleaning fluid in the first conduit past the second conduit connection to provide a negative pressure to draw the gas from the deaerator into the exhausted sample cleaning fluid in the first conduit.

A fine particle measuring system for semiconductor cleaning fluid, wherein light is directed through a measuring cell containing a sample of cleaning fluid and a detector system measures the light from the measuring cell to determine a measurement of the fine particles in the cleaning fluid, comprising:

• a sample tank for holding a sample of cleaning fluid;
• pump means for circulating the sample of cleaning fluid;
• a return conduit connected to the sample tank and to the pump means including a filter and a bubble discharge opening member connected to the filter;
• a cooling unit to cool the sample cleaning fluid before entering the measuring cell, the pump means directs a major portion of the cleaning fluid to the filter and a minor portion to the cooling unit;
• a deaerator connected to the cooling unit and the measuring cell for removing gas bubbles from the sample cleaning fluid;
• a first conduit connected to the measuring cell to receive the sample cleaning fluid as it is exhausted from the measuring cell;
• and
• a second conduit connected to the deaerator and the first conduit to draw the gas from the bubbles separated from the deaerator and to mix the gas with the exhausted sample cleaning fluid, the pump means for circulating forcing the exhausted sample cleaning fluid in the first conduit past the second conduit connection to provide a negative pressure to draw the gas from the deaerator into the exhausted sample cleaning fluid in the first conduit.