Spectroscopic accessory for examining films and coatings on solid surfaces
AssigneeRamspec Corporation
InventorsPeter J. Melling, Paul H. Shelley
Life of this patent
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Abstract
An accessory for an FTIR spectrometer comprises fiber-optic cables connected to a framework within which two mirrors are housed. The mirrors, which are preferably off-axis parabolas, are positionable with respect to each other and with respect to the ends of the fiber-optic cables. The beam from the first cable is reflected by the first mirror onto a sample surface at or near the grazing angle, after which it is captured by the second mirror and focused onto the end of the return cable which transmits it back to the spectrometer. Very thin films and coatings can be spectroscopically detected and characterized using the accessory.
Claims12
A fiber-optic probe for use with a spectroscopic light source and a radiation detector, comprising a rigid framework having a base suitable to be placed directly onto a sample surface and characterized in that:
- (a) the rigid framework is substantially open across the base part which is in contact with the sample surface
- (b) a first collimating mirror and a second focussing mirror are held within the rigid framework
- (c) a first fiber optic cable is attached at its first end to the spectroscopic light source and at its second end to the rigid framework such that radiation from the spectroscopic light source is directed through the first fiber optic cable onto the surface of the first collimating mirror from which it is reflected onto the sample surface
- (d) a second fiber optic cable is attached at its first end to the rigid framework and at its second end to the radiation detector such that the light reflected from the first collimating mirror onto the sample surface is subsequently reflected onto the second focussing mirror, from which it is reflected onto the end of the second fiber optic cable such that the reflected radiation is transmitted through the second fiber optic cable to the radiation detector.
A fiber-optic probe for use with a spectroscopic light source and a radiation detector, comprising a rigid framework having a base suitable to be placed directly onto a sample surface and characterized in that:
- (a) the rigid framework is substantially open across the base part which is in contact with the sample surface
- (b) a first collimating mirror and a second focussing mirror are held within the rigid framework by means of positionable holders such that they can be moved in relation to one another
- (c) a fiber optic cable is attached at its first end to the spectroscopic light source and at its second end to the rigid framework such that radiation from the spectroscopic light source is directed through the first fiber optic cable onto the surface of the first collimating mirror from which it is reflected onto the sample surface
- (d) the radiation detector is attached to the rigid framework such that the light reflected from the first collimating mirror onto the sample surface is subsequently reflected onto the second focussing mirror, from which it is reflected onto the radiation detector.
Dependencies are inferred from the claim text.