Electron impact elastic recoil hydrogen atom analyzer
AssigneeRiken
InventorsAkio Koyama, Tsuyoshi Horiki, Akira Yoneda
Life of this patent
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Abstract
An electron impact elastic recoil hydrogen atom analyzer includes an electron gun that projects an electron beam on a surface of a specimen for electron bombardment to make hydrogen atoms contained in the specimen elastically recoil, a hydrogen detecting unit that detects hydrogen atoms emitted from the specimen, and a data processing unit that determines a depth-distribution of hydrogen in the specimen on the basis of data provided by the hydrogen detecting unit. The hydrogen detecting unit includes an ionizer for ionizing hydrogen atoms emitted from the specimen, a deflector for energy analysis of hydrogen ions, and an electron multiplying channel plate for detecting the deflected hydrogen ions.
Claims11
An electron elastic impact recoil hydrogen atom analyzer comprising:
- an electron beam projecting unit for projecting an electron beam on a surface of a specimen containing hydrogen, for electron bombardment to make hydrogen atoms contained in the specimen recoil;
- and
- a hydrogen detecting unit for detecting hydrogen atoms emitted from the specimen.
Dependencies are inferred from the claim text.