US 6,310,342 B1 · Optical microscope stage for scanning probe microscope

Abstract

Scanning probe microscopes and scanning probe heads are provided having improved optical visualization and sample manipulation capabilities. The SPMs and SPM heads include at least one flexure stage for scanning in the x, y and/or z directions. In a preferred embodiment, the SPMs or SPM heads include flexure stages for scanning in the x, y and z directions. The z scanning stage is preferably positioned outside the lateral footprint of the x-y flexure stage so that a probe extending from the z scanning stage is outside the lateral footprint of the instrument. The SPMs and SPM heads are configured to provide top down and bottom up optical views of the sample and/or the probe and enable simultaneous scanning probe microscopy and optical imaging of a sample to be performed. The SPMs and SPM heads are designed to be readily combinable with existing upright and inverted optical microscopes currently available from various major manufacturers.

Claims9

Dependent claims

An optical microscope stage comprising:

a sample stage having a horizontal surface on which a sample holder may be positioned;
a coarse x-y control stage for supporting a head of a scanning probe microscope (SPM) above the sample stage and moving the SPM head relative to the sample stage;
and
a member positioned adjacent the horizontal surface of the sample stage, the member comprising an internal perimeter that defines an interior space which allows a sample holder to be positioned on the horizontal surface of the sample stage within the internal perimeter, the member being laterally movable relative to the horizontal surface independent of the sample holder such that the member repositions the sample holder relative to the horizontal surface by laterally pushing the sample holder without lifting the sample holder, the interior space defined by the inner perimeter of the member being sufficiently large that the sample holder may be within the interior space without contacting the internal perimeter of the member.

1 more element

Dependencies are inferred from the claim text.

Optical microscope stage for scanning probe microscope

Life of this patent

Optical microscope stage for scanning probe microscope

Life of this patent

Abstract

Claims9