Projecting type charged particle microscope and projecting type substrate inspection system

A projecting type substrate inspection system comprising:

• a charged particle gun for emitting a charged particle beam,
• an energy filter for deflecting the charged particle beam to direct said beam to a sample and energy-dispersing the charged particle beam,
• a first projective lens arranged between the sample and the energy filter for projecting the charged particle beam on the sample to emit charged particles therefrom and focusing and making the charged particles incident on the energy filter,
• a second projective lens for projecting the energy-dispersed charged particles on a plane, an imager arranged in the plane for imaging the charged particles projected by the second projective lens, the first projective lens, the energy filter and the second projective lens being stacked and arranged in a direction substantially perpendicular to a surface of the sample, and
• means for performing alignment of said substrate.

A projecting type substrate inspection system comprising:

• a charged particle gun for emitting a charged particle beam;
• an energy filter for deflecting the charged particle beam to direct said beam to a sample and energy-dispersing the charged particle beam;
• a first projective lens arranged between the sample and the energy filter for projecting the charged particle beam on the sample to emit charged particles therefrom and focusing and making the charged particles incident on the energy filter;
• and
• a second projective lens for projecting the energy-dispersed charged particles on a plane, an imager arranged in the plane for imaging the charged particles projected by the second projective lens, the first projective lens, the energy filter and the second projective lens being stacked and arranged in a direction substantially perpendicular to a surface of the sample;
• and
• a laser micrometer for determining a position of said substrate in connection with said irradiation beam.

A projecting type charged particle microscope, comprising:

• a particle gun for emitting a charged particle beam,
• an energy filter comprising first and second magnetic pole pieces, the first magnetic pole piece deflecting the charged particle beam to direct said beam to a sample as to emit charged particles therefrom and deflecting at least the charged particles in arc form, and the second magnetic pole piece deflecting the charged particles emitted from the sample to direct the same to the first magnetic pole piece and deflecting the charged particles deflected by the first magnetic pole piece to direct the same in the direction opposite to that which the first magnetic pole piece directs the beam to the sample,
• a first projective lens arranged between the sample and the energy filter for projecting the charged particle beam on the sample and focusing and making the charged particles incident on the energy filter,
• a second projective lens for projecting the charged particles deflected by the energy filter on a plane, and
• an imager for imaging the charged particles projected by the second projective lens.