Arrangement for connecting a low-pressure inlet of a gas analyzer
AssigneeUnaxis Balzers Aktiengesellschaft
InventorGerhard Rettinghaus
Life of this patent
Estimating the term…
Abstract
Arrangement and method for connecting a low-pressure connection of a gas analyzer with a test gas connection operated at a higher pressure level includes a connection line with a connection for the low-pressure connection and a connection for the test gas connection. A gas flow connection leads into the connection line, and a valve body is configured to be operable in the connection line for controlling a gas flow cross-section thereof for the connection to the low-pressure connection. The valve body is guided within a line section connected with the connection line on the gas flow connection, and the gas flow cross-section is formed between an interior wall thereof and the valve body.
Claims10
Apparatus for connecting a low-pressure input of a gas analyzer with an input for a test gas to be analyzed, said input for said test gas being operable at a higher gas pressure than permissible for said gas analyzer input, comprising:
- a connection line interconnecting a connection for said low-pressure input and a connection for said input for said test gas;
- a gas flow line opening in said connection line and having at least one gas-flow-line-connector remote from said connection line;
- a valve body configured and arranged to be movable in said gas flow line to control a gas flow cross-section of said connection line between said connection for said low-pressure input and said connection for said input for said test gas;
- and
- a gas flow path from said connection line to said gas-flow-line-connector and in said gas flow line being formed between said movable valve body and the inner wall of said gas flow line.
Mass spectrometer, comprising an apparatus including
- a connection line interconnecting a connection for low-pressure input and a connection for input for a test gas;
- a valve body configured and arranged to be movable in said gas flow line to control a gas flow cross-section of said connection line between said connection for said low-pressure input and said connection for said input for said test gas;
- and
- a gas flow path from said connection line to said gas-flow-line-connector and in said gas flow line being formed between said movable valve body and the inner wall of said gas flow line.
Dependencies are inferred from the claim text.