Organic copper compound, liquid mixture containing the compound, and copper thin-film prepared using the solution
AssigneeMitsubishi Materials Corporation
InventorsAtsushi Itsuki, Katsumi Ogi
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AssigneeMitsubishi Materials Corporation
InventorsAtsushi Itsuki, Katsumi Ogi
Estimating the term…
An organic copper compound is provided that is represented by the following formula (1) in which monovalent copper is coordinated with a β-diketone compound and an unsaturated hydrocarbon compound having a silyloxy group: wherein R Is an unsaturated hydrocarbon moiety, L is the β-diketone compound, X1, X2, and X3 are each a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or an alkoxy group having 1 to 4 carbon atoms, and X1, X2, and X3 may be the same or different from each other. The organic copper compound is barely decomposed in a stock solution before use, has a prolonged storage life, exhibits a high film deposition rate, can be effectively decomposed on a substrate, is highly volatile, and exhibits high adhesiveness to an underlayer.
An organic copper compound represented by the following formula (1):
An organic copper compound represented by the following formula (2):
An organic copper compound represented by the following formula (3):
Dependencies are inferred from the claim text.