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US 6,310,018 B1Granted
Fluorinated solvent compositions containing hydrogen fluoride
Assignee3M Innovative Properties Company
InventorsFrederick E. Behr, Lawrence A. Zazzera, Paul E. Rajtar, Michael J. Parent
Life of this patent
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Abstract
A homogeneous compositions containing a fluorinated solvent, hydrogen fluoride, and a co-solvent, and the use of these compositions for cleaning and etching of substrates is described.
Claims23
A essentially anhydrous cleaning composition comprising 88 weight percent or more of a fluorinated solvent, from 0.005 to 2 weight percent of hydrogen fluoride or complex thereof, and from 0.01 to 5 weight percent of a co-solvent.
Dependencies are inferred from the claim text.