Stripe photodiode element with high quantum efficiency for an image sensor cell
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsDun-Nian Yaung, Shou-Gwo Wuu, Chien-Hsien Tseng
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsDun-Nian Yaung, Shou-Gwo Wuu, Chien-Hsien Tseng
Estimating the term…
A method of fabricating a stripe photodiode element, for an image sensor cell, has been developed. The stripe photodiode element is comprised of a narrow width, serpentine shaped, lightly doped N type region, in a P well region. The use of the serpentine shaped region results in increased photon collection area, when compared to counterparts fabricated using non-serpentine shaped patterns. In addition the use of the serpentine shaped N type regions allow both vertical, as well as horizontal depletion regions, to result, thus increasing the quantum efficiency of the photodiode element. The combination of narrow width, and a reduced dopant level, for the N type serpentine shaped region, result in a fully depleted photodiode element.
A method of fabricating a stripe photodiode element, for an image sensor cell, on a semiconductor substrate, featuring a lightly doped, narrow width, serpentine shaped, N type region, in a P well region, comprising the steps of:
Dependencies are inferred from the claim text.