Method for securing and processing thin film materials
AssigneeMorton International, Inc.
InventorRichard W. Carpenter
Life of this patent
Estimating the term…
Abstract
To secure a thin film to a rigid carrier for subsequent exposure to processing chemicals, the thin film is initially adhered to the rigid carrier with a light adhesive from which the thin film may later be peeled. Then a photoresist is applied over the thin film extending over a peripheral region of the carrier along the perimeter of the thin film. The photoresist is exposed to actinic radiation in a pattern such that when the photoresist is subsequently developed, a perimeter region of the photoresist remains over the perimeter region of the carrier and extending inward over the periphery of the thin film sufficiently to secure the thin film during conveyorized chemical processing. Finally the resist is stripped to release the thin film and the thin film pealed from the adhesive pattern.
Claims10
A method of securing a thin film material for conveyorized processing comprising
- providing a rigid carrier having surface dimensions greater than that of said thin film such that said thin film may be placed on a surface of said carrier leaving a perimeter area exposed,
- applying an adhesive on said surface of said carrier in a pattern designed to adhere at least a peripheral portion of said thin film, said adhesive being selected to have greater adherence to said surface of said carrier than to said thin film and having sufficiently low adhesion to said thin film such that said thin film may later be pealed from said adhesive pattern without damage to said thin film,
- adhering said thin film to said adhesive pattern,
- applying a photoresist layer over said thin film such that said photoresist layer extends over said exposed perimeter area of said carrier,
- exposing said photoresist layer to patterned actinic radiation, the pattern of said actinic radiation being such that in subsequent development, a perimeter region of said photoresist remains over said perimeter region of said carrier surface and extends inward over a peripheral portion of said thin film sufficiently to secure said thin film during subsequent processing.
Dependencies are inferred from the claim text.