Method for producing needle diamond-type structure
AssigneeThe University of Tokyo
InventorsAkira Fujishima, Hideki Masuda
Life of this patent
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Abstract
A method of producing a needle-like diamond structure including the steps of forming a layer of anodized alumina on a diamond substrate, the anodized alumina having a plurality of through holes; vapor-depositing a substance resistant to plasma etching by a vacuum vapor-depositing method to form dots on said diamond substrate, wherein the layer of anodized alumina acts as a mask for the vapor deposition; removing the anodized alumina; and performing a plasma etching treatment while using the dots as a mask, thereby forming regularly-arranged, needle-like diamond columns.
Claims10
A method of producing a needle-like diamond structure, comprising the steps of:
- forming a layer of anodized alumina on a diamond substrate, said anodized alumina having a plurality of through holes;
- vapor-depositing a substance resistant to plasma etching by a vacuum vapor-depositing method to form dots on said diamond substrate, wherein said layer of anodized alumina acts as a mask for the vapor deposition;
- removing said anodized alumina;
- and
- performing a plasma etching treatment while using said dots as a mask, thereby forming regularly-arranged, needle-like diamond columns.
Dependencies are inferred from the claim text.