Hazardous containment for MBE maintenance
AssigneeTRW Inc.
InventorTodd K. Makishi
Life of this patent
Estimating the term…
Abstract
A containment system (1) for use in cleaning of an MBE chamber contains a two part housing in a clam-shell like structure with upper (5) and lower (7) housing sections that are latched together (8) with the walls defining a containment region. The housing is secured to the face of the MBE chamber with the source flange cover of that chamber received through an opening in the rear wall (13 & 19). A closure (28) permits opening or closing a front access opening in the housing through which the containment region may be accessed. The housing includes a exhaust vent tube (11). The containment system includes the means for detecting fire (34) in the confinement region and extinguishing the fires (35) and exhausting any gases through the vent tube.
Claims11
A containment system for an MBE chamber, said chamber including a front wall and an access port in said wall, said access port including a removable port cover, comprising:
- a housing, said housing including a plurality of walls defining a containment region, said plurality of walls including a rear wall, a front access opening at the front of said housing to permit access to said confinement region from said front, and an exhaust vent tube for exhausting gas from said confinement region;
- said rear wall including an opening for receiving at least a portion of said removable port cover within said containment region, whereby removal of said removable port cover provides access into said MBE chamber from said containment region;
- a closure for said front access opening, said closure being movable between an opening position, whereby said front access opening is uncovered and a closed position, whereby said front access opening is closed;
- and
- fasteners for fastening said housing to said face of said MBE chamber with said port cover received within said opening in said rear wall.
Dependencies are inferred from the claim text.