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US 6,309,212 B1Granted
Substrate conveying system and device manufacturing method using the same
AssigneeCanon Kabushiki Kaisha
InventorHiroshi Nakazato
Life of this patent
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Abstract
In a substrate conveying system, the temperature adjustment for a substrate is performed by use of a temperature adjusting plate which is provided at a substrate transfer station where a substrate can be transferred from or to an outside structure, by which the substrate temperature adjustment can be accomplished without a decrease of a processing speed of a semiconductor manufacturing apparatus and without deposition of contaminations.
Claims8
A substrate conveying system, comprising:
- a transfer station whereat a substrate can be transferred between said substrate conveying system and a particular system different from said substrate conveying system, said transfer station having a substrate temperature adjusting plate for adjusting a temperature of the substrate;
- and
- substrate conveying means for conveying between said transfer station and a desired position,
- wherein the temperature of the substrate at the transfer station is adjusted during a period in which the substrate is held in a stand-by state.
1 more element
A substrate conveying system, comprising:
- a transfer station whereat a substrate can be transferred between said substrate conveying system and a particular system different from said substrate conveying system, said transfer station having a substrate temperature adjusting plate for adjusting a temperature of the substrate;
- and
- substrate conveying means for conveying between said transfer station and a desired position,
- wherein said substrate temperature adjusting plate has a notch defined so that said plate does not interfere with a substrate holding portion of said substrate conveying means when the substrate is to be transferred.
1 more element
A substrate conveying method, comprising the steps of:
- conveying a substrate from a particular system to a transfer station whereat a substrate can be transferred from or to the particular system;
- adjusting a temperature of the substrate at the transfer station;
- and
- conveying the substrate from the transfer station to a desired position,
- wherein the temperature of the substrate at the transfer station is adjusted during a period in which the substrate is held in a stand-by state.
2 more elements
Dependencies are inferred from the claim text.