Substrate processing system

A substrate process system for processing a large substrate in accordance with a photolithographic process, comprising;

• a cassette section;
• a process section having a plurality of process units vertically stacked in multiple stages;
• a plurality of circularly moving main transfer arm mechanisms arranged in a transfer space surrounded by the process section and the cassette section, and arranged at different heights corresponding to positions of the process units stacked in multiple stages, for transferring substrates one by one not only between a cassette of the cassette section and each of the plurality of process units but also between the plurality of process units,
• a loop transfer path movably supporting the circularly moving main transfer arm mechanisms and guiding the circularly moving main transfer arm mechanisms so as to face each of the process units and the cassette section;
• a plurality of delivery tables arranged in a middle region of the transfer space and arranged at different heights corresponding to positions of the process units stacked in the multiple stages;
• and
• a vertical transfer arm mechanism arranged at the middle region of the transfer space, for transferring the substrates one by one to/from each of the circularly moving transfer arm mechanisms via the delivery table;
• said vertically transfer arm mechanism comprising
• a holder for holding the substrate;
• an up-and-down moving mechanism for moving the holder up and down;
• a θ rotary moving mechanism for rotating the holder about a vertical shaft;
• and
• a back-and-forth moving mechanism for moving the holder back and forth,
• wherein said each of the circularly moving main transfer arm mechanisms comprises
• a holder for holding the substrate;
• a loop moving mechanism for moving the holder along the loop transfer path;
• a θ rotary moving mechanism for rotating the holder about a vertical shaft;
• and
• a back-and-forth moving mechanism for moving the holder back and forth.