Circuit and method of compensating for membrane stress in a sensor

Abstract

A circuit and method for correcting a sense signal of a sensor (100) where the sense signal is reduced by a negative nonlinear error component introduced by membrane stress in a sensor structure (101). A first transducer (103) is disposed at a location (203) having substantial bending stress to produce a sense signal having a linear component and the nonlinear error component. A second transducer (102) is disposed at a location (202) with substantially zero bending stress to produce a sense signal having the nonlinear error component but a substantially zero linear component. The sense signal from the second transducer (102) is added to the sense signal from the first transducer (103) to correct the nonlinear error for producing a linear output sense signal (VOUT) of the sensor (100) which is representative of the physical condition.

Dependencies are inferred from the claim text.